Equipment Dashboard
Utilization · MTBF / MTTR · sensorsUtilization, MTBF / MTTR, and recent sensor readings with anomaly flags.
Utilization, MTBF / MTTR, and recent sensor readings with anomaly flags.
Sorted descending. Hover for exact percentage.
| ID | Type | Bay | Util | MTBF | MTTR | Yield |
|---|---|---|---|---|---|---|
| EQ-025 | Lithography | Bay-02 | 89.5% | 960 | 3.23 | 92.9% |
| EQ-018 | Etch | Bay-01 | 88.0% | 587 | 1.88 | 90.8% |
| EQ-011 | Metrology | Bay-06 | 87.5% | 1044 | 4.02 | 95.2% |
| EQ-013 | Lithography | Bay-02 | 86.2% | 932 | 6.08 | 92.9% |
| EQ-006 | Etch | Bay-01 | 86.0% | 556 | 4.53 | 90.8% |
| EQ-026 | CVD | Bay-03 | 86.0% | 974 | 4.42 | 91.8% |
| EQ-000 | Etch | Bay-01 | 85.9% | 751 | 7.08 | 91.2% |
| EQ-005 | Metrology | Bay-06 | 85.5% | 684 | 7.81 | 94.7% |
| EQ-029 | Metrology | Bay-06 | 85.5% | 976 | 4.31 | 95.3% |
| EQ-012 | Etch | Bay-01 | 83.4% | 512 | 2.80 | 90.8% |
| EQ-015 | CMP | Bay-04 | 83.0% | 777 | 5.17 | 90.0% |
| EQ-020 | CVD | Bay-03 | 82.9% | 725 | 6.79 | 91.5% |
| EQ-003 | CMP | Bay-04 | 82.4% | 1058 | 4.38 | 89.6% |
| EQ-016 | IonImplant | Bay-05 | 82.1% | 843 | 5.13 | 92.2% |
| EQ-004 | IonImplant | Bay-05 | 80.0% | 451 | 6.88 | 92.0% |
| EQ-014 | CVD | Bay-03 | 77.4% | 855 | 2.41 | 91.9% |
| EQ-023 | Metrology | Bay-06 | 77.0% | 705 | 3.46 | 95.4% |
| EQ-010 | IonImplant | Bay-05 | 76.8% | 1066 | 6.05 | 91.9% |
| EQ-024 | Etch | Bay-01 | 74.8% | 470 | 2.27 | 91.1% |
| EQ-008 | CVD | Bay-03 | 73.8% | 696 | 4.55 | 91.1% |
| EQ-028 | IonImplant | Bay-05 | 73.3% | 863 | 2.65 | 92.1% |
| EQ-019 | Lithography | Bay-02 | 72.9% | 930 | 5.12 | 92.7% |
| EQ-022 | IonImplant | Bay-05 | 69.4% | 801 | 2.49 | 92.3% |
| EQ-007 | Lithography | Bay-02 | 69.2% | 946 | 6.34 | 92.6% |
| EQ-002 | CVD | Bay-03 | 68.5% | 760 | 3.91 | 92.0% |
| EQ-009 | CMP | Bay-04 | 68.5% | 781 | 2.97 | 89.9% |
| EQ-027 | CMP | Bay-04 | 67.6% | 1122 | 4.46 | 89.7% |
| EQ-001 | Lithography | Bay-02 | 67.5% | 1181 | 6.45 | 92.7% |
| EQ-017 | Metrology | Bay-06 | 65.8% | 749 | 2.89 | 95.7% |
| EQ-021 | CMP | Bay-04 | 65.6% | 472 | 6.20 | 90.1% |
Latest 24 readings. Rows with anomaly flag highlighted.
| Time | Equip | Temp | Press | Vib | Flag |
|---|---|---|---|---|---|
| 04-17 00:00 | EQ-028 | 25.5 | -0.001 | 0.154 | — |
| 04-17 00:00 | EQ-026 | 454.6 | 5.523 | 0.234 | — |
| 04-17 00:00 | EQ-016 | 25.9 | 0.000 | 0.199 | — |
| 04-17 00:00 | EQ-004 | 24.4 | -0.002 | 0.152 | — |
| 04-17 00:00 | EQ-027 | 35.0 | 3.182 | 0.674 | — |
| 04-17 00:00 | EQ-008 | 457.8 | 5.730 | 0.260 | — |
| 04-17 00:00 | EQ-014 | 451.9 | 5.356 | 0.232 | — |
| 04-17 00:00 | EQ-001 | 23.6 | 1.007 | 0.072 | — |
| 04-17 00:00 | EQ-010 | 24.9 | -0.000 | 0.161 | — |
| 04-17 00:00 | EQ-007 | 21.8 | 1.015 | 0.084 | — |
| 04-17 00:00 | EQ-025 | 22.7 | 1.017 | 0.085 | — |
| 04-17 00:00 | EQ-003 | 34.7 | 3.316 | 0.442 | — |
| 04-17 00:00 | EQ-021 | 35.1 | 3.379 | 0.663 | — |
| 04-17 00:00 | EQ-015 | 34.4 | 3.134 | 0.679 | — |
| 04-17 00:00 | EQ-000 | 176.0 | 2.435 | 0.354 | — |
| 04-17 00:00 | EQ-020 | 446.2 | 5.538 | 0.155 | — |
| 04-17 00:00 | EQ-024 | 180.1 | 2.278 | 0.411 | — |
| 04-17 00:00 | EQ-006 | 184.4 | 2.325 | 0.440 | — |
| 04-17 00:00 | EQ-017 | 21.8 | 1.014 | 0.060 | — |
| 04-17 00:00 | EQ-019 | 22.6 | 0.960 | 0.084 | — |
| 04-17 00:00 | EQ-012 | 177.8 | 2.365 | 0.334 | — |
| 04-17 00:00 | EQ-002 | 459.2 | 5.724 | 0.198 | — |
| 04-17 00:00 | EQ-009 | 35.0 | 3.382 | 0.523 | — |
| 04-17 00:00 | EQ-029 | 26.5 | 0.617 | 0.168 | anom |